Rapid Thermal Processing

Performance just as OEM

Engineering-COMPONENTS & NEW PARTS

Sourcing solutions for Rapid Thermal Processing

For RTP as well, we are able to provide a selection of highly professional new parts. Especially for parts like the ball bearing for AMAT XE which has been cancelled by the OEM and therefore will be no longer available, it may be a real (and sometimes the only) alternative for our customers. It facilitates sourcing or makes it possible at all and prolongs the life cycle of the existing machinery.

We are offering following RTP new parts

Upper & lower ball bearings for AMAT XE

Gold sleeves for lamp houses

Sapphire pins

REFURBISHMENTS & REPAIRS

Used RTP components as good as new

Components used in Rapid Thermal Processing are exposed to extreme conditions and strain, so that they degrade very quickly. Additionally, their structures, regarding shape, build-up and/or composition of coatings are quite complex which makes competent refurbishment quite difficult. Equipment manufacturers mostly only offer expensive spare parts and no repair services at all. That’s where amcoss steps in – we offer a first-class repair service!

We refurbish following components:

Lamp house for AMAT Xe & Mod1

Mattson reactor SHS2900

Reflector plate for AMAT XE, Radiance, Mod1

Upper & lower ball bearings for AMAT XE

And we calibrate

• Tempmatch tools for Centura, Radiance and Radiance+
• Sekidenko 2000

COMPLETE REFURBISHMENT OF RTP LAMP HOUSES

Complex, reliable, economic

Untight welding seams, mechanical defects, fissures, chemical deposits and surface damages can lead to reduced functionality of a lamp house. Even though lamp house refurbishment, due to its complex structure is a very challenging process, amcoss has developed a professional refurbishment procedure. Therefore, our experts are carrying out various process steps as e.g., chemical cleaning, leak tests, mechanical treatments and welding of defective parts. The result is a refurbished, fully functional lamp house, being a lot more economic than a new one.

Before refurbishment

After refurbishment

Sleeves for lamp house

RepaIr OF mattson reaCTORS SHS 2900

It’s all about coating quality and tightness

A Mattson reactor is a very complex construction. Due to extensive exposure the gold
coating degrades and leaks appear. In a time-consuming process the reactor is being completely dismantled to find out about the extent of damage. Afterwards we de-coat, mechanically rework, clean and finally re-coat the parts. After assembly and leakage test the Mattson does not only look like a new one it also works that way.

Dismantling

Degradation of coating and mechanical damages on all parts

Before refurbishment

After refurbishment

Final Leakage test and quality control

After successful refurbishment and assembly Mattson reactors SHS 2900, as well as lamp houses will additionally be subject to a special high-temperature, water-pressure leakage test. In this test real working conditions are being simulated: For 24 hours water heated up to 90°C will be pumped through the tubes and cooling pipes with a pressure of 5 bar. Water temperature will vary between 20°C and 90°C. So, possible leaks can be detected and consequently be repaired. This guarantees highest quality and best possible functionality.

Refurbishment OF AMAT RefleCTOR PLATES

Reflection and process security without compromises

During refurbishment your used reflector plates are being de-coated, polished and afterwards re-coated.
This repair process restores the maximum reflection capacity in all important and relevant wavelength ranges. We have developed an optimized, special multi-layer coating, making absolutely sure to only use materials specified by the OEM, so that no „foreign“ substances might get into the process chamber. The coating design and the technology applied guarantee extremely homogeneous, consistent and long-living coatings, the durability of which prevent early chipping and/or corrosion.

Before
Refurbishment

After
Refurbishment

Refurbishment OF RTP BALL BEARINGS FOR AMAT RTP XE

A well-rounded solution

The surface of a ball bearing is often being scratched and so the ceramic balls damage the PVD coating and the surface beneath. This leads to the fact that concentricity as well as axial lateral run of the bearing get off tolerance. Other consequences are high noise levels and particle buildup. amcoss offers new ball bearings (second source) as well as exclusive refurbishments (de-coating, mechanical treatment, polishing, new PVD coating – the same as OEM coating) – and both at attractive, unrivalled prices. Parameters and quality of our ball bearings correspond to those of an OEM component, but they are a lot more sustainable.

CALIBRATION OF
Tempmatch Tool, Sekidenko 2000 & Radiance (+) Tester

Inspection with highest precision

We calibrate following inspection tools for AMAT Centura XE, Radiance und Radiance (+)

Tempmatch tool

Radiance (+) tester

Sekidenko 2000

At first, we will examine whether any optical or electrical components have degraded and exchange them if necessary. Afterwards we will carry out exact measurements and calibrations on various testing devices and with the help of our Black Body Furnace. This procedure ensures best quality of our services for you. At the end of the refurbishment process we generate an individual test report for each refurbished and calibrated tool which together with the device is being provided to the customer. Our service will be a lot more economic than an OEM refurbishment.

Inhouse test stand for tempmatch tool calibrations

RTP AMAT item numbers