Modular amr system for customer-specific equipment

All amr modules have the same compact footprint (besides the control module which is even smaller). This makes the room required easily projectable and saves expensive facility/laboratory space.



Our amcoss series is a completely modular system. The control module, which contains the controlling system, can be combined flexibly with one or several selected processing modules (coater, cleaner, developer, lift-off, hot-/coolplate, vapor priming hotplate, media cabinet) according to customer needs or process requirements. So, we are able to create a tool meeting the individual needs of every single client.

Configuration examples: