amcoss products for substrate processing

  • Fully-automated single wafer processing equipment amc 1000+, amc 2000+, amc 2500+ for coating, developing, cleaning, lift-off, vapor priming, heating and cooling
  • Semi-automated single wafer processing equipment amr 200 and amr 300 for small-lot production in laboratories, R&D, etc. (coating, developing, cleaning, lift-off, vapor priming, heating and cooling)
  • Spin coating, spray oating
  • Spin developing, spray developing
  • Vapor Priming
  • Wafer cleaning
  • (Laboratory) hotplate/coolplate
  • Development of process modules
  • ams pilot software for process control
  • HMDS batch processing equipment amc hmds200
  • Customer-specific equipment
  • Media cabinet
  • amh heat exchanger for temperatures from 30 °C to 95 °C
  • amh chiller for temperatures from 0 °C to 60 °C

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