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HMDS (Hexamethyldisilzan) improves adhesion of photoresists and is very often used in photolithography. amcoss amc hmds200 is a specially developed equipment for the HMDS processing of wafers in volume production – which is outstanding in the market. Where conventional HMDS coating equipment will already meet their technical and quantitative limits, doing only individual substrates at a time, amc hmds200 is the right and especially economical alternative, being able to work on up to 50 substrates, up to 200mm in diameter, in 2 cassettes at the same time.
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Carrier station with detection
Process chamber with HMDS vaporizer
Touchscreen for operating amc software
Pressuretank with pressure control
Exhaust control
Safety precautions
HMDS (Hexamethyldisilzan) improves adhesion of photoresists and is very often used in photolithography. amcoss amc hmds200 is a specially developed equipment for the HMDS processing of wafers in volume production – which is outstanding in the market. Where conventional HMDS coating equipment will already meet their technical and quantitative limits, doing only individual substrates at a time, amc hmds200 is the right and especially economical alternative, being able to work on up to 50 substrates, up to 200mm in diameter, in 2 cassettes at the same time.
