amc hmds200 – HMDS batch processing equipment

HMDS (Hexamethyldisilzan) improves adhesion of photoresists and is very often used in photolithography. amcoss amc hmds200 is a specially developed equipment for the HMDS processing of wafers in volume production – which is outstanding in the market. Where conventional HMDS coating equipment will already meet their technical and quantitative limits, doing only individual substrates at a time, amc hmds200 is the right and especially economical alternative, being able to work on up to 50 substrates, up to 200mm in diameter, in 2 cassettes at the same time.

 

HMDS (Hexamethyldisilzan) improves adhesion of photoresists and is very often used in photolithography. amcoss amc hmds200 is a specially developed equipment for the HMDS processing of wafers in volume production – which is outstanding in the market. Where conventional HMDS coating equipment will already meet their technical and quantitative limits, doing only individual substrates at a time, amc hmds200 is the right and especially economical alternative, being able to work on up to 50 substrates, up to 200mm in diameter, in 2 cassettes at the same time.