Refurbishment of Canon stepper chucks and ASML wafer tables

amcoss offers refurbishment of the front- and backsides of Canon stepper exposure pin and ring chucks as well as ASML wafer tables.

At first we will check whether spots, scratches and most of all cracks and chippings can be repaired at all.

Before and after repair flatness of the chuck is being precisely measured via interferometer. Even during the refurbishment process various measurements are being taken, until the best possible PV (Peak-to-Valley) value, which marks flatness, is being reached.

Flatness Comparison – Peak-to-Valley-Value